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| equipment model ： | df-3000b |
| equipment type ： | cassette-type & cassetteless-type |
| wafer size ： | 300mm |
| configuration ： | 8~12 baths,2~6 robots （according to the demand） |
| megasonic /ultrasonic | |
| bath over-temperature protection, equipped with leak leak protection | |
| multi-level wafer protection | |
| c.c.s.s or l.c.s.s supply | |
| automatic supply and support multiple concentration ratio | |
| advanced marangoni dry | |
| temperature control, concentration control, flow control, pressure control | |
| chemical/diw recycle & drain | |
| relibility ： | uptime≥95% breakage≤1/100000 |
| mtbf≥650 hours mttr≤3 hours | |
| software control ： | pc plc gui, support schedule, eap,fdc etc |
| equipment model： | fy-3000s |
| wafer size： | 300mm |
| chamber： | 4~24 chambers（according to the demand） |
| vacuum or grip | |
| 4~5 dispensers，2~3 chemicals | |
| exhaust separation: acid, alkali, organic drain separation etch chemical | |
| e f e m ： | 2 or 4 smif/foup, 1 index robot, 1or 2 wtr |
| chemical supply： | c.c.s.s or l.c.s.s supply |
| circulation pump | |
| heating control, concentration control, flow control, pressure control | |
| chemical / diw, drain & recycle | |
| configuration： | lonrizer / o3 / hd camera |
| relibility： | uptime≥95% breakage≤1/100000 |
| mtbf≥500 hours mttr≤3 hours | |
| software control： | pc plc gui, support eap, fdc etc |